General Information

• Part Number: 8080-0338-01

• Model: ZMI-501A（2-axis measurement enclosure）

• Manufacturer: ZYGO（AMETEK）

• Product Type: Dual-axis laser interferometer measurement electronic unit

• Application: High-precision linear displacement measurement, semiconductor stage positioning, 2-axis motion control

• Compatible Laser Heads: ZMI-7705（8070-0902-01X/03X）

• Alternative Part: 8020-0237-01（older revision）

Functional Specifications

• Measurement Axes: 2 independent axes（X/Y）

• Laser Input: Dual-frequency HeNe（3.6 MHz beat）

• Output Resolution: 0.1 nm（single-pass）；0.05 nm（double-pass）

• Max Measurement Range: 2 m（single-pass）；4 m（double-pass）

• Max Velocity: 0.5 m/s（with 3.6 MHz laser）

• Update Rate: Up to 40 kHz

• Cyclic Error: ≤±0.5 nm（with compensation）

• Signal Interface: Fiber-optic（reference + measurement）

• Data Output: RS-232, Ethernet, SSI（optional）

Electrical Specifications

• Power Input: ±15 VDC ±0.5 V

• Current Draw: +15 V @ 2.0 A；−15 V @ 1.2 A

• Power Consumption: 35 W（typical）

• Laser Drive: Integrated（for ZMI-7705）

• Fuse Rating: 3 A（internal）

• EMI Compliance: CE, FCC Class A

Mechanical Parameters

• Dimensions（L×W×H）: 254 mm × 203 mm × 89 mm

• Weight: 4.5 kg（9.9 lb）

• Housing: Rugged aluminum alloy, EMI-shielded

• Mounting: Desktop or 19” rack-mount（optional bracket）

• Connectors: Fiber optic, D-Sub, power, Ethernet

Environmental Specifications

• Operating Temp: 10 °C to 35 °C

• Storage Temp: −40 °C to +70 °C

• Humidity: 10%–90% RH, non-condensing

• Vibration: 0.1 g max（5–200 Hz）

• Cleanroom: ISO Class 7 compatible

Key Features

• 2-axis simultaneous measurement for X/Y stage positioning

• Sub-nanometer resolution for ultra-precision metrology

• Plug-and-play with ZMI-7705 laser head（3.6 MHz Zeeman split）

• Integrated laser power supply simplifies system wiring

• Industrial rugged design for 24/7 continuous operation

• Compatible with ZYGO Mx™ software for data acquisition & analysis