1. General Information

• Model: ZMI-510

• Part No: 8070-0902-0X

• Manufacturer: ZYGO (AMETEK)

• Type: Mini Zeeman split dual-frequency HeNe laser head

• Cooling Method: Air cooled

• Main Application: Precision laser interferometry, semiconductor lithography stage positioning

• Matching Electronic Unit: ZMI-501A, ZMI-2000 series measuring board

2. Optical Specifications

• Laser Medium: Continuous Wave Helium-Neon

• Nominal Wavelength: 632.8 nm

• Polarization State: Two orthogonal linear polarization

• Beat Frequency: 3.6 MHz standard

• Output Optical Power: ≥250 µW

• Standard Beam Diameter: 4 mm

• Effective Measuring Distance: Max 2 meters

• Beam Direction Stability: Less than 0.5 arcsec/°C

• 1 Hour Frequency Stability: ≤10 ppb

• 24 Hours Wavelength Stability: ±0.01 ppm

• Full stability warm-up time: Within 10 minutes

3. Electrical Parameters

• Input Supply: ±15 VDC

• +15 V Working Current: 1.8 A

• -15 V Working Current: 1.0 A

• Normal Operating Power: 28 W

• Max Warm-up Power Consumption: 42 W

• Light emission response time: Less than 10 seconds

4. Mechanical Parameters

• Total Weight: 3.8 kg

• Shell Material: Anodized aluminum alloy

• Mounting Structure: Standard fixed base installation

• Feature: Small size, easy installation and space saving

5. Environmental Requirements

• Operating Temperature Range: 10 °C ~ 30 °C

• Storage Temperature Range: -40 °C ~ 70 °C

• Working Humidity: 0% ~ 90% RH, non-condensing

6. Laser Safety Standard

• Safety Level: Class II

• Conform to: IEC 60825 international laser safety standard

7. Compatibility

• Fully compatible with ZMI-501A dual-axis interferometer system

• Matches ZMI-2001 single-axis measurement board

• Mainly used for short-distance high-precision displacement detection equipment