1. General Information

• Part Number: 8020-0237-03

• Model: ZMI‑501A

• Manufacturer: ZYGO (AMETEK)

• Type: 2‑axis interferometer measurement electronics (stand‑alone enclosure)

• Application: High‑precision displacement measurement, semiconductor wafer/reticle stages

• Compatible Laser: ZMI‑7705 (8070‑0902 series) dual‑frequency HeNe laser head

• Configuration: 24‑bit, 2‑channel, enclosure‑type system

2. Measurement Performance

• Position Resolution: 1.24 nm (O/512)

• Accuracy @ Max Velocity (σ): 1.6 nm

• Max Measurement Range: ±10.6 m (double‑pass)

• Max Target Velocity: 475 mm/s

• Data Rate: 3–24 MHz, selectable

• Linearity Accuracy: 1.3 LSB at 3 V

• Cyclic Error Compensation: Not supported

3. Optical Interface

• Minimum Input Optical Power: 8 µWZYGO

• Laser Compatibility: ZMI‑7705 only

• Input: Dual‑frequency interferometer signal (632.8 nm)

4. Electrical Specifications

• Power Supply: +5.2 VDC (‑0.0 / +0.4 V tolerance)

• Operating Current: 3.3 A

• Power Consumption: ~17 W

• Output Interface: Digital position data, synchronous clock, alarm signals

5. Mechanical Characteristics

• Weight: 1 kg (2 lb)

• Construction: Anodized aluminum enclosure

• Mounting: Bottom M3 or 6‑32 UNC threaded holes

• Cable Clearance: 127 mm (5 in) at both ends

• Dimensions (W×H×D): ~220 × 80 × 150 mm (typical)

6. Environmental Conditions

• Operating Temperature: 0 °C to 40 °C

• Storage Temperature: −40 °C to +70 °C

• Humidity: 0%–85% RH, non‑condensing

• Cooling: Convection air cooling (do not block vents)

7. Compatibility

• Laser Head: ZMI‑7705 (8070‑0902‑03 / 0X)

• Measurement Board: ZMI‑2001 (8020‑0210)

• System: Interferometer‑based high‑precision positioning systems