1. General Information

• Part Number: 8020-0450

• Revision: REV.C

• Manufacturer: ZYGO (AMETEK)

• Product Type: 6U VME bus multi-axis interferometer measuring board

• Application: Semiconductor lithography equipment, ultra-precision motion platform displacement detection

• Compatible Laser Head: ZMI-7702, ZMI-7705 series dual-frequency HeNe laser

• Matching System: ZMI high precision interferometer measurement system

2. System Structure

• Form Factor: Standard 6U VME single slot board

• Measuring Channels: 4 independent measuring axes

• Bus Interface: VME bus, P2 high-speed synchronous bus

• Max Expandable Quantity: Up to 16 boards in one chassis

3. Measurement Performance

• Max Position Resolution: 0.6 nm

• Max Measuring Speed: 1.1 m/s

• Double-pass Measuring Range: ±10.6 m

• Selectable Data Clock Rate: 3 MHz ~ 24 MHz

• Linearity Accuracy: ≤ 1.3 LSB @ 3V

• Built-in Function: Cyclic error automatic compensation

4. Optical Signal Specification

• Applicable Wavelength: 632.8 nm HeNe laser

• Beat Frequency Adaptation: 3.6 MHz / 20 MHz

• Minimum Input Optical Power: ≥ 8 µW per channel

• Input Signal: Dual orthogonal polarization heterodyne interference signal

5. Electrical Characteristics

• Power Supply: +5.2 VDC, ±15 VDC

• Typical Power Consumption: 25 W

• Maximum Power Consumption: 38 W

• Stable Digital Data Output: Position, speed, status and alarm signals

6. Mechanical Parameter

• Board Size: Standard 6U VME dimension

• Approximate Weight: 1.2 kg

7. Environmental Conditions

• Operating Temperature: 0 °C ~ 40 °C

• Storage Temperature: -40 °C ~ +70 °C

• Relative Humidity: 0% ~ 85% RH, non-condensing

• Working Condition: Support long-term continuous operation, suitable for clean room environment

8. Main Features

• Synchronous high-precision measurement for four axes simultaneously

• High-speed data transmission via VME bus

• Excellent long-term running stability and anti-interference capability

• Easy installation and system integration, convenient maintenance and replacement