• Part Number: 8020‑0237‑01 (also 0090‑A6270)

• Manufacturer: ZYGO (AMETEK)

• Model: ZMI‑501A

• Product Type: Stand‑alone 2‑axis interferometer measurement unit

• Application: High‑precision displacement metrology, semiconductor lithography, precision stage positioning

• Compatible Laser: ZMI‑7705 dual‑frequency HeNe laser head

Optical Specifications

• Wavelength: 632.8 nm (HeNe)

• Min. Input Optical Power: ≥8 µW per channel

• Input Signal: Orthogonal polarized heterodyne interference

• Beat Frequency: 3.6 MHz / 20 MHz compatible

Measurement Performance

• Axes: 2 independent channels

• Position Resolution: 1.24 nm (double‑pass, O/512)

• Max Velocity: 475 mm/s (0.475 m/s)

• Measuring Range: ±10.6 m (double‑pass)

• Data Rate: 3 MHz ~ 24 MHz selectable

• Linearity Accuracy: ≤1.3 LSB @ 3 V

• Cyclic Error Compensation: No

Electrical Specifications

• Power Supply: +5.2 VDC (‑0.0 / +0.4 V)

• Operating Current: 3.3 A typical

• Power Consumption: ~17 W typical

• Output Interfaces: Quadrature, up/down pulses, 32‑bit parallel data

• Signal I/O: Position, velocity, status, alarm

Mechanical Parameters

• Form Factor: Compact stand‑alone enclosure

• Weight: 2 lb (≈1 kg)

• Cable Clearance: 5 in (127 mm) at both ends

• Mounting: M3 or 6‑32 UNC holes

Environmental Specifications

• Operating Temperature: 0 °C to +40 °C

• Storage Temperature: −40 °C to +70 °C

• Relative Humidity: 0%–85% RH, non‑condensing

• Environment: Cleanroom‑safe, 24/7 continuous operation

Main Features

• Two‑axis simultaneous nanometer‑level displacement measurement

• Compact standalone design for easy integration into OEM systems

• High‑speed parallel data output for fast closed‑loop control

• Optimized for ZMI‑7705 laser head, plug‑and‑play

• High stability and reliability for precision industrial metrology