• Part Number: 8020-0513 (ZMI-501A)

• Manufacturer: ZYGO (AMETEK)

• Product Type: Stand‑alone 2‑axis laser interferometer measurement unitZYGO

• Application: High‑precision displacement metrology, semiconductor lithography, precision stage positioning

• Compatible Laser: ZMI‑7705 dual‑frequency HeNe laser head

Optical Specifications

• Operating Wavelength: 632.8 nm (HeNe)

• Minimum Input Optical Power: ≥8 µW per channel

• Input Signal: Orthogonal polarized heterodyne interference signal

• Beat Frequency: 3.6 MHz / 20 MHz (compatible)

Measurement Performance

• Number of Axes: 2 independent measurement channelsZYGO

• Position Resolution: 1.24 nm (double‑pass)

• Maximum Velocity: ±0.475 m/s (475 mm/s)

• Measuring Range: ±10.6 m (double‑pass)

• Data Rate: 3 MHz ~ 24 MHz selectable

• Linearity Accuracy: ≤1.3 LSB @ 3 V

• Accuracy at Max Velocity (σ): 1.6 nmZYGO

• Cyclic Error Compensation: Not supportedZYGO

Electrical Specifications

• Power Supply: +5.2 VDC (‑0.0 / +0.4 V)

• Operating Current: 3.3 A typical

• Output Interfaces: Quadrature, up/down pulses, parallel 32‑bit data

• Signal I/O: Position, velocity, status, alarm signals

Mechanical Parameters

• Form Factor: Stand‑alone enclosureZYGO

• Weight: 2 lb (≈1 kg)

• Cable Clearance: 5 in (127 mm) at both ends

• Mounting: M3 (4 mm deep) or 6‑32 UNC (1/8 in deep) holes

Environmental Specifications

• Operating Temperature: 0 °C to 40 °C

• Storage Temperature: ‑40 °C to +70 °C

• Relative Humidity: 0% ~ 85% RH, non‑condensing

• Operation Grade: Cleanroom‑compatible, 24/7 continuous operation

Main Features

• Compact stand‑alone design for easy integration

• Two‑axis simultaneous high‑precision displacement measurement

• High‑speed parallel data output for fast stage control

• Designed for cost‑effective OEM metrology solutions

• Long‑term reliability with ZYGO’s precision laser technology