1. General Information

• Part Number: 8020-0210 (often 8020-0210-01-J)

• Model: ZMI-2001

• Manufacturer: ZYGO (AMETEK)

• Type: Single-axis interferometer measurement board (6U VME)

• Application: Semiconductor lithography, ultra-precision stage metrology, laser interferometry

• Compatible Laser Head: ZMI-7702 / 7705 (8070 series)

• System: ZMI-2000 displacement measuring interferometer system

2. Measurement Performance

• Laser Wavelength: 632.8 nm (HeNe)

• Displacement Resolution:

  • 2‑Pass PMI: 0.31 nm (λ/2048)

  • 4‑Pass PMI: 0.15 nm (λ/4096)

• Max Measurement Range:

  • 2‑Pass PMI: ±10.6 m

  • 1‑Pass LI: ±21.2 m

• Max Velocity:

  • 2‑Pass PMI: ±2.1 m/s

  • 1‑Pass LI: ±4.2 m/s

3. Data Formats

• Position: 36‑bit 2’s complement

• Velocity: 32‑bit 2’s complement

• Time: 32‑bit 2’s complement; range 107.4 s, resolution 25 ns

4. Interfaces

• VME Bus: 6U, A16/A24 address, D16/D32 data

• ISA Bus: 16‑bit (PC version)

• P2 Bus: 32‑bit, up to 7.7 MHz data rate; supports up to 16 axes

• Fiber Optics: Reference + measurement fiber inputs

• Error Monitoring: Signal, PLL, DLL, loss, glitch, overflow

5. Electrical

• Power Supply: +5 VDC ±5% @ 3.5 A

• PC Version Only: +12 VDC ±10% @ 0.1 A

• Power Dissipation: ~17.5 W (typical)

6. Mechanical & Environmental

• Form Factor: 6U VME board (single slot)

• Operating Temperature: 10 °C to 30 °C

• Storage Temperature: −40 °C to +70 °C

• Humidity: 20%–80% RH, non‑condensing

7. Synchronization & Accuracy

• Multi‑Axis Sync: Clock I/O option; up to 8 axes supported

• Timing Error:

  • Uncompensated: ±36 ns

  • Compensated: ±1.4 ns

8. Key Features

• Single‑axis, high‑resolution interferometry for nanometer‑level positioning

• Compatible with ZMI‑7702/7705 laser heads (20 MHz heterodyne)

• VME/ISA/P2 interfaces for flexible system integration

• Long‑term stability for semiconductor and precision manufacturing