1. General Information

• Model: ZMI-7705

• Part No: 8070-0902-01X

• Manufacturer: ZYGO (AMETEK)

• Type: Compact Heterodyne Dual-Frequency HeNe Laser Head

• Application: Semiconductor lithography, precision stage positioning, laser interferometry

• Matching System: Nikon NSR series scanner, ZMI-501A measurement unit

• Cooling Mode: Air cooled

2. Optical Specifications

• Laser Type: Continuous Wave HeNe Gas Laser

• Vacuum Wavelength: 632.8 nm

• Polarization: Two orthogonal linear polarization

• Beat Frequency: 3.6 MHz ± tolerance

• Output Optical Power: ≥ 250 µW

• Standard Beam Diameter: 3 mm

• Maximum Measuring Range: 2 meters

• Beam Pointing Stability: < 0.5 arcsec/°C

• Short-term Frequency Stability: 5 ppb per hour

• 24 Hours Wavelength Stability: ±0.01 ppm

3. Electrical Parameters

• Input Power Supply: ±15 VDC

• +15 V Current: 1.8 A

• -15 V Current: 1.0 A

• Rated Operating Power: 28 W

• Max Warm-up Power: 42 W

• Light Emitting Time: Less than 10 seconds

• Full Stability Warm-up Time: 8 minutes typical

4. Mechanical Characteristics

• Overall Weight: 3.8 kg

• Structure Material: Anodized aluminum alloy

• Mounting Base: Standard fixed foot installation

• Compact Size, Space-saving installation design

5. Environmental Conditions

• Operating Temperature: 10 °C ~ 30 °C

• Storage Temperature: -40 °C ~ 70 °C

• Working Humidity: 0% ~ 90% RH, non-condensing

• Shock Resistance: Meet industrial standard vibration level

6. Safety Grade

• Laser Safety Class: Class II

• Meet international laser safety standard IEC 60825

7. Compatibility

• Perfectly matched with ZMI-501A dual-axis interferometer board

• Exclusive supporting laser source for Nikon NSR-S620D related positioning system

• Applicable to short-distance high-precision displacement measurement scene