1. General Information

• Model: ZMI-501A

• Full Part Number: 8020-0237-010090-A6270

• Manufacturer: ZYGO (AMETEK)

• Type: Standalone 2-channel dual-axis fiber interferometer processing unit

• Application: Semiconductor lithography equipment, ultra-precision stage positioning, optical metrology

• Matching Device: Nikon NSR-S620D scanner system

• Condition: New / Refurbished OEM spare part

2. Model Code Definition

• 8020: ZMI measurement electronic series

• 0237: Main assembly code for ZMI-501A

• 01: Hardware revision version

• 0090-A6270: Custom customer code for Nikon dedicated equipment

• ZMI-501A: Official product designation

3. Measurement Performance Specification

• Channel Quantity: 2 independent measuring axes

• Max Resolution: 1.24 nm

• Data Bit Depth: 24 bit

• Linearity Accuracy: 1.3 LSB @ 3V

• Minimum Input Optical Power: ≥ 8 µW per channel

• Data Clock Rate: 3 MHz ~ 24 MHz optional

• Effective Measuring Range: ±10.6 m

• Max Target Moving Speed: 475 mm/s

• Compatible Laser Source: ZMI-7705 dual-frequency HeNe laser head, 632.99 nm

4. Electrical & Mechanical Parameters

• Input Power: +5.2 VDC, 3.3 A

• Voltage Tolerance: -0.0 V ~ +0.4 V

• Dimension: 127 × 127 × 50 mm

• Weight: Approx. 1.0 kg

• Mounting Method: Bottom threaded mounting holes

• Interface: FC/PC fiber input port, serial data output, trigger & power I/O port

5. Environmental Specification

• Operating Temperature: 0 °C ~ 40 °C

• Storage Temperature: -20 °C ~ 60 °C

• Relative Humidity: 20% ~ 80% RH, non-condensing

• Matching Accessories: ZYGO 8040 series fiber optic pickup heads

6. Main Features

• Compact standalone structure, easy installation and debugging

• Dual-axis synchronous high-precision displacement detection

• Stable signal processing, suitable for long-term factory continuous operation

• Perfect compatibility with Nikon lithography machine original control system

• Nano-level positioning feedback for wafer stage and reticle stage