1. General Information

• Part Number: 8040-0130-01D (full: 8040-0130-01D NSR-S620D)

• Manufacturer: ZYGO (Ametek)

• Type: ZMI fiber optic pickup, 18 mm aperture

• Compatible System: Nikon NSR‑S620D ArF immersion scanner

• Function: Receives two‑frequency HeNe laser beam, couples into polarization‑maintaining fiber for interferometric stage position feedback

• Condition: Used / refurbished OEM spare

• Warranty: 90‑day (used) / 1‑year (refurbished)

2. Optical Specifications

• Aperture Diameter: 18 mm

• Laser Wavelength: 632.99 nm (HeNe, two‑frequency heterodyne)

• Polarization: Dual orthogonal linear (F1/F2)

• Fiber Type: Single‑mode, polarization‑maintaining (PM)

• Minimum Input Power: ≥ 1.0 µW

• Coupling Efficiency: ≥ 75% (typical, 18mm design)

• Return Loss: ≤ −40 dB

• Beam Acceptance Angle: ±2.5 mrad

• Beat Frequency: 20 MHz (interferometer signal)

3. Mechanical & Physical

• Dimensions (L × W × H): ~ 90 mm × 70 mm × 35 mm

• Weight: ~ 0.6 kg

• Housing: Anodized aluminum

• Fiber Connector: FC/PC (ZMI‑compliant)

• Mounting: Two‑hole flange, NSR‑S620D optical bench compatible

4. Environmental

• Operating Temp: 18 °C to 28 °C (semiconductor fab)

• Storage Temp: −20 °C to 60 °C

• Humidity: 20%–80% RH, non‑condensing

• Vibration: 0.1 g rms, 10 Hz–1 kHz (operating)

5. Electrical & System Compatibility

• Signal Output: Fiber‑coupled heterodyne interferometer signal

• Interferometer Boards: ZYGO ZMI‑2400 / 4000 / 4100 series

• Laser Source: ZMI‑7702 / 7712 / 7714 two‑frequency HeNe heads

• Application: 6‑axis stage position feedback for NSR‑S620D scanner

6. Model Code Explanation

• 8040: ZMI fiber optic pickup series

• 0130: 18 mm aperture, high‑throughput design

• 01: Revision level

• D: Dual‑fiber / high‑power variant

• NSR‑S620D: System compatibility (Nikon NSR‑S620D)