1. General Information

• Part Number: 8040-0128-01 (often referenced with system suffix: 8040-0128-01NSR-S610C)

• Manufacturer: ZYGO (Ametek)

• Product Type: ZMI Fiber Optic Pickup, 9mm aperture

• Compatible System: Nikon NSR-S610C Step-and-Repeat Scanning System

• Function: Receives two‑frequency HeNe laser signal, couples into fiber for interferometer displacement measurementZYGO

• Condition: Used / Refurbished surplus from semiconductor equipment

• Warranty: Typically 90‑day (used) / 1‑year (refurbished)

2. Optical Specifications

• Aperture Diameter: 9 mm

• Fiber Type: Single‑mode, polarization‑maintaining (PM)

• Wavelength: 632.99 nm (HeNe, two‑frequency)ZYGO

• Polarization: Dual orthogonal linear polarizations (F1/F2)ZYGO

• Minimum Input Power: ≥ 1.0 µWZYGO

• Coupling Efficiency: ≥ 70% (typical)

• Return Loss: ≤ −40 dB

• Beam Acceptance Angle: ±2.5 mrad

3. Mechanical & Physical

• Dimensions (L × W × H): ~ 80 mm × 60 mm × 30 mm

• Weight: ~ 0.5 kg

• Housing Material: Anodized aluminum

• Fiber Connector: FC/PC (or equivalent ZMI‑compliant)

• Mounting: Two‑hole flange, compatible with NSR‑S610C optical bench

4. Environmental

• Operating Temperature: 18 °C to 28 °C (semiconductor fab environment)

• Storage Temperature: −20 °C to 60 °C

• Humidity: 20%–80% RH, non‑condensing

• Vibration: 0.1 g rms, 10 Hz–1 kHz (operating)

5. Electrical Interface

• Signal Output: Fiber‑coupled heterodyne beam (20 MHz beat frequency)ZYGO

• Compatibility: ZYGO ZMI‑2400 / 4000 / 4100 series interferometer boardsZYGO

• Laser Source: Matches ZMI‑7702 / 7712 / 7714 two‑frequency HeNe lasersZYGO

6. Applications

• Primary: Nikon NSR‑S610C ArF scanner, 6‑axis laser interferometry position feedback

• Metrology: High‑precision stage positioning, sub‑nanometer resolution displacement measurementZYGO

7. Model Code Breakdown

• 8040: ZMI fiber optic pickup series

• 0128: 9mm aperture, standard sensitivity

• 01: Revision level

• NSR‑S610C: System compatibility (Nikon NSR‑S610C scanner)