1. General Information

• Model: ZMI‑2001

• Part Numbers:

  • 8020‑0210（base）

  • 8020‑0210‑01（configured variant, often with ‑J suffix）

• Manufacturer: ZYGO（AMETEK）

• Type: Single‑axis, 6U VMEbus（Rev. C）DMI receiver board；also supports ISA bus

• Application: Semiconductor lithography, ultra‑precision positioning, machine tools, optical metrology, vacuum/aerospace, nanopositioning

• Dimensions: 229 × 114 × 29 mm

• Weight: ~0.9 kg

• Form Factor: 6U VME, single slot

2. Measurement Performance（HeNe laser, λ=632.8 nm）

• Channels: 1 axis（single‑board）

• Resolution:

  • 1‑pass LI: 0.62 nm

  • 2‑pass PMI: 0.31 nm

  • 4‑pass PMI: 0.15 nm（sub‑nanometer）

• Accuracy: ±0.1 μm（sub‑micron）

• Max Range:

  • 1‑pass: ±21.2 m

  • 2‑pass: ±10.6 m

  • 4‑pass: ±5.3 m

• Max Velocity:

  • 1‑pass: 4.2 m/s

  • 2‑pass: 2.1 m/s

  • 4‑pass: 1.05 m/s

• Max Acceleration: 980 m/s²（100 g）

• Data Age: 335 ns；uncertainty ±12 ns（single‑axis）

3. Electrical & I/O

• Power: +5 VDC ±5%, 3.5 A（VME backplane）；+12 VDC ±10%, 0.1 A（ISA/PC version only）

• Host Interfaces:

  • VMEbus: A16/A24, D16/D32

  • ISA 16‑bit（optional）

  • P2 high‑speed link: up to 7.7 MHz（multi‑axis sync）

• Data Formats:

  • Position: 36‑bit two’s complement

  • Velocity: 32‑bit two’s complement

  • Time: 32‑bit, 25 ns resolution；range 107.4 s

• Fiber Optics: Reference + measurement fiber inputs（per axis）

• Synchronization: Clock in/out, programmable sync；multi‑axis sync up to 8 boards/8 axes

• Error Monitoring: Signal, PLL/DLL lock, loss‑of‑signal, jitter, overflow, etc.

4. Environmental

• Operating Temp: 0 °C to +40 °C（precision applications）

• Storage Temp: −20 °C to +70 °C

• Humidity: 5%–95% RH, non‑condensing

• Vibration: IEC 60068‑2‑6 compliant

• Protection: Conformal coated；industrial ESD hardening

5. Key Features

• Single‑axis laser interferometry（ZMI‑2002 is dual‑axis）

• Sub‑nanometer resolution（0.15 nm max）

• High speed up to 4.2 m/s

• VME/ISA/P2 multi‑bus compatibility

• Precision timing（25 ns）& low jitter（±12 ns）

• Modular expansion: up to 8 axes（ZMI‑2002 up to 16 axes）

6. Differences Between Part Numbers

• 8020‑0210: Base model, VME interface, standard firmware

• 8020‑0210‑01: Configured variant（typically includes ISA support, extended temp, or custom firmware）；often suffixed ‑J（factory configuration）