ZMI-2001
Description
1. General Information
Model: ZMI‑2001
Manufacturer: ZYGO（AMETEK）
Type: Single‑axis, 6U VME laser interferometer receiver board
Part Numbers: 8020‑0210‑01‑J, 8020‑1210‑01
Application: Semiconductor lithography, ultra‑precision positioning, machine tools, optical metrology, research labs
Form Factor: 6U VMEbus（rev. C）, also supports ISA bus
Weight: ~0.9 kg
Dimensions: 229 × 114 × 29 mm
2. Measurement Performance（HeNe laser, λ=632.8 nm）
Channels: 1 axis synchronous measurement
Resolution:
1‑pass LI: 0.62 nm
2‑pass PMI: 0.31 nm
4‑pass PMI: 0.15 nm
Accuracy: ±0.1 μm（sub‑micron）
Max Range: ±21.2 m（1‑pass）；±10.6 m（2‑pass）；±5.3 m（4‑pass）
Max Velocity:
1‑pass: 4.2 m/s
2‑pass: 2.1 m/s
4‑pass: 1.05 m/s
Max Acceleration: 980 m/s²（100 g）
Data Age: 335 ns；uncertainty ±12 ns（single‑axis）
3. Electrical & I/O
Power: +5 VDC ±5%, 3.5 A（VME backplane）；+12 VDC ±10%, 0.1 A（PC version only）
Data Interface:
VMEbus（A16/A24, D16/D32）
ISA 16‑bit
P2 high‑speed link: up to 7.7 MHz
Data Formats:
Position: 36‑bit two’s complement
Velocity: 32‑bit two’s complement
Time: 32‑bit, 25 ns resolution；range 107.4 s
Fiber Optics: Reference + measurement inputs per axis
Synchronization: Clock in / clock out；programmable sync signals；multi‑axis sync up to 8 axes
Error Monitoring: Signal, PLL, DLL, loss, jitter, overflow, etc.
4. Environmental
Operating Temp: 0 °C to +40 °C（precision applications）
Storage Temp: −20 °C to +70 °C
Humidity: 5%–95% RH, non‑condensing
Vibration: IEC 60068‑2‑6 compliant
Protection: Conformal coated；industrial ESD hardening
5. Key Features
1‑axis simultaneous laser interferometry
Sub‑nanometer resolution（0.15 nm max）
High speed up to 4.2 m/s
VME/ISA/P2 multi‑bus compatibility
Precision timing（25 ns）& low jitter（±12 ns）
Modular expansion up to 8 axes
6. Applications
Semiconductor wafer stage & lithography positioning
Ultra‑precision machine tool feedback
Optical component manufacturing & testing
Vacuum & aerospace metrology
Nanopositioning & fundamental research
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