1. General Information

• Model: ZMI‑2002

• Manufacturer: ZYGO（AMETEK）

• Type: Dual‑axis, 6U VME laser interferometer receiver board

• Application: Semiconductor lithography, ultra‑precision positioning, machine tools, optical metrology, research labs

• Form Factor: 6U VMEbus（rev. C）, also supports ISA bus

• Part Number: 8020‑0211 / 8020‑0211‑1‑J

• Weight: ~1.2 kg

• Dimensions: 229 × 114 × 29 mm

2. Measurement Performance（HeNe laser, λ=632.8 nm）

• Channels: 2 axes synchronous measurement

• Resolution:

  • 1‑pass LI: 0.62 nm

  • 2‑pass PMI: 0.31 nm

  • 4‑pass PMI: 0.15 nm

• Accuracy: ±0.1 μm（sub‑micron）

• Max Range: ±21.2 m（1‑pass）；±10.6 m（2‑pass）；±5.3 m（4‑pass）

• Max Velocity:

  • 1‑pass: 4.2 m/s

  • 2‑pass: 2.1 m/s

  • 4‑pass: 1.05 m/s

• Max Acceleration: 980 m/s²（100 g）

• Data Age: 335 ns；uncertainty ±12 ns（2‑axis）

3. Electrical & I/O

• Power: +5 VDC ±5%, 3.5 A（VME backplane）

• Data Interface:

  • VMEbus（backplane）

  • P2 high‑speed link: up to 7.7 MHz

• Data Formats:

  • Position: 36‑bit two’s complement

  • Velocity: 32‑bit two’s complement

  • Time: 32‑bit, 25 ns resolution；range 107.4 s

• Fiber Optics: Reference + measurement inputs per axis

• Synchronization: Clock in / clock out；programmable sync signals

4. Environmental

• Operating Temp: 0 °C to +40 °C（precision applications）

• Storage Temp: −20 °C to +70 °C

• Humidity: 5%–95% RH, non‑condensing

• Vibration: IEC 60068‑2‑6 compliant

• Protection: Conformal coated；industrial ESD hardening

5. Key Features

• 2‑axis simultaneous laser interferometry

• Sub‑nanometer resolution（0.15 nm max）

• High speed up to 4.2 m/s

• VME/ISA/P2 multi‑bus compatibility

• Precision timing（25 ns）& low jitter（±12 ns）

• Modular expansion up to 16 axes

6. Applications

• Semiconductor wafer stage & lithography positioning

• Ultra‑precision machine tool feedback

• Optical component manufacturing & testing

• Vacuum & aerospace metrology

• Nanopositioning & fundamental research