FC-7700CU Product Description Advanced Energy FC-7700CU, also named FC-7700 series mass flow controller, is a precision gas flow control unit for semiconductor process system. It is designed to measure and accurately regulate gas mass flow rate, supporting stable gas delivery control for old process equipment renovation.

This controller delivers reliable flow regulation for industrial process tasks. The flow regulation supports high-precision mass flow measurement of multiple process gases. The flow regulation realizes closed-loop adjustment to maintain set flow value. Stable flow regulation completes consistent gas supply for thin film processing equipment.

The built-in sensing circuit achieves steady flow sampling. The flow sampling captures real-time gas mass flow value through thermal sensor. The flow sampling supports fast response and high repeatability measurement. Accurate flow sampling ensures gas supply matches production recipe requirements.

Panel mounting structure brings convenient equipment integration. Equipment integration can be installed on gas cabinet or process tool manifold. Equipment integration connects gas pipeline and control signal via dedicated connectors. Flexible equipment integration is widely used for legacy FC-7700 series spare replacement.

FC-7700CU supports over-range alarm and gas flow status monitoring function, equipped with gas inlet/outlet fittings and signal interface port. It has status indicators for running state and fault diagnosis. Widely applied in semiconductor deposition equipment, vacuum processing machines and precision manufacturing lines. This product is discontinued by Advanced Energy, mainly supplied as industrial spare parts, complying with FC-7700 series mass flow controller industrial standards.