Description

AFC260 belongs to Qualiflow AFC series thermal mass flow controller, dedicated for precise gas mass flow measurement and closed-loop control. It adopts thermal sensing principle with integrated proportional control valve and elastomer sealing structure. Standard gas connection is 1/4" 4VCR metal fitting, compatible with high purity gas pipeline.

This MFC accepts analog 0-5V / 4-20mA setpoint signal and outputs flow feedback signal, also available with Modbus digital communication option. It features soft-start function to prevent gas flow overshoot during startup. The control valve can be detached and cleaned separately to reduce maintenance cost when clogged. It supports multiple gas types including nitrogen, argon and process specialty gases. It requires warm-up for about 20 minutes to achieve rated precision.

Built-in protection includes overpressure protection, over-temperature protection and flow fault alarm. Operating temperature range 10~45℃, working gas pressure within standard semiconductor process pressure range.

AFC260 is discontinued legacy Qualiflow process spare part. Many old semiconductor vacuum process equipment still adopt this MFC. When the original unit fails, replacing it with identical AFC260 can reuse existing gas pipeline, signal wiring and host process configuration. Technicians install the MFC, perform gas leak test, calibrate flow setpoint and verify closed-loop regulation, so the gas delivery control system resumes operation and reduces downtime.

Before shipment, every AFC260 undergoes comprehensive functional inspection including gas leak test, flow calibration, analog signal test and valve response check. All products come with 12-month warranty. Our automation technical team provides remote support for installation, wiring guidance, gas calibration and fault diagnosis. Fast global shipping available for urgent maintenance orders.

For automation maintenance engineers and system integrators, AFC260 is reliable spare mass flow controller for legacy semiconductor gas process systems. It restores precision gas mass flow regulation, extends service life of process assets and avoids high-cost whole gas system renovation.


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