Unit Instruments UFC-1660 Product Description

Unit Instruments UFC-1660 is a high-precision mass flow controller built for semiconductor ultra-pure gas distribution systems. This mass flow controller measures and regulates gas mass flow rate without pressure compensation. The compact mass flow controller adopts metal Z-seal construction for corrosive specialty gas. This mass flow controller delivers stable gas supply for wafer processing and thin-film deposition.

UFC-1660 provides accurate gas flow regulation for various process gases in cleanroom production. Precise gas flow regulation maintains consistent flow setpoint during recipe switching. Reliable gas flow regulation reduces product rejection caused by gas fluctuation. Stable gas flow regulation supports continuous batch manufacturing in semiconductor fabs.

This unit features leak-tight metal seal structure to prevent gas leakage for hazardous process media. The robust metal seal structure can withstand high pressure up to 500 PSI. The corrosion-resistant metal seal structure works with NF3, Cl2 and other aggressive gases. This durable metal seal structure meets strict UHP gas delivery requirements.

Unit Instruments UFC-1660 is widely used in semiconductor, photovoltaic and thin-film coating processes. It supports VCR connection and edge card electrical interface for easy integration. It is a discontinued original spare part for maintenance and upgrade of old gas panel systems.