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FC280SAV

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FC280SAV
May 27, 2026

FC280SAV

The FC280SAV is a compact, high-performance mass flow controller (MFC) designed for precise measurement and control of gas flow in industrial processes. Manufactured by Tylan (a brand of Brooks Instrument), it delivers accurate, repeatable flow regulation for a wide range of gases, including methane, nitrogen, oxygen, and argon. Featuring a robust stainless steel construction and advanced thermal mass flow sensing technology, the FC280SAV ensures stable operation under varying pressure and temperature conditions. With a compact footprint and user-friendly digital interface, it simplifies integration into new or existing systems, making it ideal for semiconductor, chemical, and pharmaceutical applications requiring precise gas flow management.

Description

FC280SAV

Product Introduction

The FC280SAV is a compact, high-performance mass flow controller (MFC) designed for precise measurement and control of gas flow in industrial processes. Manufactured by Tylan (a brand of Brooks Instrument), it delivers accurate, repeatable flow regulation for a wide range of gases, including methane, nitrogen, oxygen, and argon. Featuring a robust stainless steel construction and advanced thermal mass flow sensing technology, the FC280SAV ensures stable operation under varying pressure and temperature conditions. With a compact footprint and user-friendly digital interface, it simplifies integration into new or existing systems, making it ideal for semiconductor, chemical, and pharmaceutical applications requiring precise gas flow management.

Basic Information

  • Model: FC280SAV

  • Brand: Tylan (Brooks Instrument)

  • Product Type: Thermal Mass Flow Controller (MFC)

  • Gas Compatibility: Methane (CH₄), nitrogen (N₂), oxygen (O₂), argon (Ar), and other non-corrosive gases

  • Flow Range: Up to 500 SCCM (standard cubic centimeters per minute)

  • Supply Voltage: 24 VDC ±10%

  • Signal Interface: 0-5 VDC analog input/output, RS-232 digital communication

  • Process Connection: 1/4 inch VCR or Swagelok fittings

  • Body Material: 316L stainless steel

  • Seal Material: Viton (standard), Kalrez (optional)

  • Protection Class: IP20

  • Operating Temperature: 0 °C to 50 °C

  • Operating Pressure: Up to 10 bar (145 psi)

  • Certifications: CE, UL, SEMI S2

  • Installation: Vertical or horizontal mounting

Function and Positioning

The FC280SAV functions as a critical component in gas delivery systems, providing closed-loop control of gas flow rates. It measures mass flow directly using thermal dispersion technology, eliminating the need for pressure or temperature compensation. The controller compares the actual flow rate to a user-defined setpoint and adjusts a proportional valve to maintain precise flow regulation. Positioned as a cost-effective, high-reliability solution for low-to-medium flow applications, it bridges the gap between basic flow meters and high-end industrial MFCs. Its compact design and versatile communication options make it suitable for both standalone operation and integration into automated process control systems.

Core Performance Parameters

  • Flow Accuracy: ±1.0% of full scale

  • Repeatability: ±0.2% of full scale

  • Response Time: <1 second (0-95% of setpoint)

  • Turndown Ratio: 100:1

  • Leak Integrity: <1×10⁻⁹ atm·cc/s (helium)

  • Warm-Up Time: <5 minutes

  • Analog Input: 0-5 VDC (setpoint)

  • Analog Output: 0-5 VDC (flow measurement)

  • Digital Communication: RS-232 (standard), Modbus RTU (optional)

  • Power Consumption: <5 W

  • EMC Compliance: EN 61000-6-1, EN 61000-6-2

General Compatible Accessories

  • 24 VDC power supply units (regulated, 1 A minimum)

  • Gas filtration systems (0.01 μm particle filter)

  • Pressure regulators (stainless steel, 0-10 bar range)

  • VCR/Swagelok fitting kits (1/4 inch, 316L stainless steel)

  • Shielded signal cables (for analog/digital communication)

  • Tylan Brooks Instrument configuration software (for RS-232 setup)

  • DIN rail mounting brackets and hardware

  • Gas leak detection solutions (helium mass spectrometer)

Applicable Equipment Fields

  • Semiconductor Manufacturing: Wafer fabrication, CVD processes, gas panel control

  • Chemical Processing: Precision gas blending, reactor feed control, pilot plant operations

  • Pharmaceutical Industry: Fermentation processes, inert gas blanketing, lyophilization

  • Analytical Instruments: Gas chromatography, mass spectrometry, calibration gas delivery

  • Research Laboratories: Material science, combustion research, environmental testing

  • Industrial Automation: Packaging machinery, laser processing, thermal treatment systems


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