General Information

• Part Number: 017-0950-01

• Manufacturer: Brooks Automation (PRI Automation)

• Model: Reliance ATR8 / CLM‑3D

• Product Type: Atmospheric 4‑axis wafer transfer robot

• Application: 200 mm wafer handling in semiconductor fabs

• Wafer Size: 200 mm (8 inch)

• Weight: 22.68 kg (50 lbs)

• Status: Discontinued by manufacturer

Mechanical Specifications

• Axes: 4 (θ, Z, R, End effector)

• Payload: 0.5 kg (max wafer + end effector)

• Horizontal Reach: 650 mm (max radial)

• Vertical Travel (Z‑axis): 400 mm

• Position Repeatability: ±0.05 mm

• Angular Repeatability: ±0.01°

• Drive System: Brushless servo motors, direct‑drive rotary joints

• End Effector: Standard 200 mm vacuum paddle (CLM‑3D)

• Construction: Aluminum alloy, stainless steel, cleanroom‑grade materials

Electrical Specifications

• Power: 208–240 VAC, 50/60 Hz, 1‑phase

• Communication: Brooks proprietary protocol, Ethernet, RS‑232/485

• I/O: 4 opto‑isolated inputs / 4 outputs (standard)

• Encoders: 23‑bit absolute encoders on all axes

Environmental Ratings

• Operating Temp: 10 °C to 40 °C

• Storage Temp: −20 °C to 60 °C

• Humidity: 20%–80% RH, non‑condensing

• Cleanliness: ISO 14644‑1 Class 3 (cleanroom compatible)

• Vibration: 0.5 g, 10–100 Hz (operating)

• Compliance: RoHS, CE

Performance Features

• Cycle Time: < 3.0 seconds (typical 200 mm wafer transfer)

• Max Speed (TCP): 500 mm/sec

• Max Acceleration: 1000 mm/sec²

• Reliability: MTBF > 80,000 hours (24/7 operation)

• Safety: E‑stop compliant, wafer breakage detection

• Maintenance: Modular design, in‑situ serviceable