General Information

• Part Number: 017-0483-01

• Manufacturer: Brooks Automation, Inc.

• Product Type: 4-axis vacuum wafer transfer robot arm assembly

• Application: Semiconductor wafer handling in vacuum environment

• Compatible Wafer Size: 200 mm / 300 mm

• Controller Compatibility: Brooks CHE series / AutoMax

• Weight: 50.8 kg (arm assembly only)

Mechanical Specifications

• Number of Axes: 4 (θ, Z, R, End effector)

• Maximum Payload: 0.5 kg (wafer + end effector)

• Horizontal Reach: 850 mm (max radial)

• Vertical Travel (Z-axis): 650 mm

• Position Repeatability: ±0.05 mm

• Angular Repeatability: ±0.01°

• Drive System: Brushless servo motors, direct-drive rotary joints

• End Effector: Standard vacuum paddle (non-outgassing material)

• Construction Materials: Stainless steel, aluminum alloy, all-metal seals

Electrical & Vacuum Specifications

• Power Requirement: 208–240 VAC, 50/60 Hz, 3-phase

• Communication Interface: Brooks proprietary protocol, Ethernet optional

• Vacuum Rating: Ultra-high vacuum (UHV) ≤ 1×10⁻⁷ Torr

• Maximum Bake Temperature: 120 °C

• I/O Interface: Discrete I/O + RS-232/485 serial port

Environmental Ratings

• Operating Temperature (Ambient): 10 °C to 40 °C

• Storage Temperature: −20 °C to 60 °C

• Relative Humidity: 20%–80% RH, non-condensing

• Cleanliness Class: ISO 14644-1 Class 1 (ultra-clean compatible)

• Vibration Resistance: 0.5 g, 10–100 Hz (operating)

• Compliance: RoHS (2011/65/EU)

Performance Features

• Cycle Time: < 2.8 seconds (typical for 200 mm wafer)

• Encoders: 23-bit high-resolution absolute encoders on all axes

• Reliability: MTBF > 100,000 hours (24/7 continuous operation)

• Maintenance: Serviceable in-situ, modular design

• Safety: E-stop compliant, vacuum interlock compatible