General Information

• Part Number: 017-0266-01

• Manufacturer: Brooks Automation (USA)

• Product Type: Vacuum Wafer Transfer Robot（4‑axis）

• Model: Reliance ATR8

• Application: Semiconductor wafer handling in vacuum environments

• Compatibility: 200 mm / 300 mm wafer systems, Brooks CHE 146828 controller

  

Mechanical Specifications

• Axes: 4（θ, Z, R, End effector）

• Payload: 0.5 kg（max wafer weight）

• Reach:

  • Horizontal: 800 mm（max）

  • Vertical (Z‑axis): 600 mm（travel）

• Repeatability: ±0.05 mm（position）；±0.01°（rotation）

• Drive System: Brushless servo motors, direct‑drive rotary joints

• End Effector: Vacuum paddle（standard）；fork type optional

• Dimensions (W×H×D): 450 × 1,200 × 450 mm

• Weight: 118 kg（robot only）；260 lbs（shipping）

• Mounting: Floor‑standing, base‑mounted

Electrical & Vacuum Specifications

• Power Supply: 208–240 VAC, 50/60 Hz, 3‑phase, 2 kVA

• Control Interface: Serial (RS‑232/485) + discrete I/O

• Vacuum Rating: 1×10⁻⁷ Torr（ultra‑high vacuum compatible）

• Pressure Range: Atmospheric to UHV（bakeable to 120 °C）

• Communication: Brooks proprietary protocol, Ethernet optional

Environmental Ratings

• Operating Temp: 10 °C to 40 °C（ambient）；0 °C to 50 °C（internal）

• Storage Temp: −20 °C to 60 °C

• Humidity: 20%–80% RH, non‑condensing

• Vibration: 0.5 g, 10–100 Hz（operating）

• Cleanliness: Class 1（ISO 14644‑1）ultra‑clean compatible

• RoHS: Compliant（2011/65/EU）

Key Features

• UHV‑compatible design: All metal seals, non‑outgassing materials

• High‑speed wafer transfer: Cycle time < 3 seconds（200 mm wafer）

• Precision positioning: Direct‑drive motors with 23‑bit encoders

• Compact footprint: Optimized for semiconductor fab layout efficiency

• Long‑term reliability: MTBF > 100,000 hours；designed for 24/7 operation